Chemically inert, thermally stable, highly pure and anisotropic
Pyrolytic Graphite (PG) is a unique form of graphite manufactured by decomposition of a hydrocarbon gas at very high temperature in a vacuum furnace (chemical vapor deposition). The result is an ultra-pure product which is near theoretical density and extremely anisotropic. This anisotropy results from the layered structure as indicated in the figure below. As an example, PG exhibits a thermal conductivity competitive with the best conductors in the "AB" plane and lower than alumina brick in the "C" direction. Mechanical, thermal, and electrical properties are generally far superior to conventional graphites. PG is available as plate or machined shapes (crucible, cylinder) and as an impermeable coating on graphite and other substrates.
a. Chemically Inert b. High Purity c. Stable to 3000 d. Impermeable e. Nondusting f. Resistive against thermal shock g. High machinability
High temperature wafer suscepter Etcher electrode Cathode