Tomoe Engineering Co., Ltd.

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  4. PG/PBN Heater

PG/PBN Heater

Description

2000℃ heat resistance
High performance under ultra-high vacuum
Corrosive gas inert
High thermal shock resistance.

Features

Complexed PG/PBN ceramics heater made by the CVD process
The high-end heater of superb temperature rising/falling characteristics and free heat pattern


Application

Quartz substrate heater
Wafer heater
SEM/STM


Related Website

CVT GmbH & Co.KG
http://www.cv-technology.com/index.html

Inquiry

Advanced Materials Dept. 2
19F Osaki Bright Core,
5-15, Kitashinagawa 5-chome, Shinagawa-ku, Tokyo 141-0001, Japan
TEL:(3)3442-5142 FAX:(3)3442-5175

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