Tomoe Engineering Co., Ltd.

Products Information

  1. Chemical Products TOP
  2. Products Information
  3. Electronic materials
  4. Reticle Case

Reticle Case

Description

Reticle Case TC-Series can store reticles with pellicles safely.
You can very easily open and close its door, while protecting cleanliness of its interior environment with its tight sealing capability.

Reticle Case introduction

Reticle Case TC-Series can store reticles with pellicles safely.
You can very easily open and close its door, while protecting cleanliness of its interior environment with its tight sealing capability.

 

Reticle Case characteristic

  • · Can load one square reticle
  • · Minimal particle contact
  • · Can safe-keep in reticle clean stocker
  • · Made in Japan

TC-Series

P/N

Reticle size

Pellicle

TC-6

5 inches

Single

TC-7

5 inches

Double

TC-8

6 inches

Double

 

P/N

Reticle size

Pellicle

Remark

TC-3

5 inches

Single

Pellicle stand width : 95mm

TC-4

5 inches

Single

Pellicle stand width : 120mm

TC-9

5 inches

Double

 

TC-10

6 inches

Double

 

Inquiry

Electronic Materials Dept.
19F Osaki Bright Core,
5-15, Kitashinagawa 5-chome, Shinagawa-ku, Tokyo 141-0001, Japan
TEL:(3)3442-5143 FAX:(3)3442-5175

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