Tomoe Engineering Co., Ltd.

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  4. Pyrolytic Graphite

Pyrolytic Graphite

Description

Chemically inert, thermally stable, highly pure and anisotropic

Description

Pyrolytic Graphite (PG) is a unique form of graphite manufactured by decomposition of a hydrocarbon gas at very high temperature in a vacuum furnace (chemical vapor deposition). The result is an ultra-pure product which is near theoretical density and extremely anisotropic. This anisotropy results from the layered structure as indicated in the figure below. As an example, PG exhibits a thermal conductivity competitive with the best conductors in the "AB" plane and lower than alumina brick in the "C" direction. Mechanical, thermal, and electrical properties are generally far superior to conventional graphites. 
PG is available as plate or machined shapes (crucible, cylinder) and as an impermeable coating on graphite and other substrates.


 

Features

a. Chemically Inert 
b. High Purity 
c. Stable to 3000 
d. Impermeable 
e. Nondusting 
f. Resistive against thermal shock
g. High machinability


Application

High temperature wafer suscepter
Etcher electrode
Cathode

Inquiry

Advanced Materials Dept.
19F Osaki Bright Core,
5-15, Kitashinagawa 5-chome, Shinagawa-ku, Tokyo 141-0001, Japan
TEL:(3)3442-5142 FAX:(3)3442-5175

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